Design of a Micromachined Z-axis Tunneling Magnetoresistive Accelerometer with Electrostatic Force Feedback

This paper presents the design, simulation, fabrication and experiments of a micromachined z-axis tunneling magnetoresistive accelerometer with electrostatic force feedback. The tunneling magnetoresistive accelerometer consists of two upper differential tunneling magnetoresistive sensors, a middle p...

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Detalles Bibliográficos
Autores principales: Yang, Bo, Wang, Binlong, Yan, Hongyu, Gao, Xiaoyong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6412558/
https://www.ncbi.nlm.nih.gov/pubmed/30823622
http://dx.doi.org/10.3390/mi10020158

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6412558/
https://www.ncbi.nlm.nih.gov/pubmed/30823622
http://dx.doi.org/10.3390/mi10020158

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