Laterally Movable Triple Electrodes Actuator toward Low Voltage and Fast Response RF-MEMS Switches

A novel actuator toward a low voltage actuation and fast response in RF-MEMS (radio frequency micro-electro-mechanical systems) switches is reported in this paper. The switch is comprised of laterally movable triple electrodes, which are bistable by electrostatic forces applied for not only the on-s...

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Detalles Bibliográficos
Autores principales: Naito, Yasuyuki, Nakamura, Kunihiko, Uenishi, Keisuke
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6412643/
https://www.ncbi.nlm.nih.gov/pubmed/30791445
http://dx.doi.org/10.3390/s19040864

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6412643/
https://www.ncbi.nlm.nih.gov/pubmed/30791445
http://dx.doi.org/10.3390/s19040864

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