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Laterally Movable Triple Electrodes Actuator toward Low Voltage and Fast Response RF-MEMS Switches
A novel actuator toward a low voltage actuation and fast response in RF-MEMS (radio frequency micro-electro-mechanical systems) switches is reported in this paper. The switch is comprised of laterally movable triple electrodes, which are bistable by electrostatic forces applied for not only the on-s...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6412643/ https://www.ncbi.nlm.nih.gov/pubmed/30791445 http://dx.doi.org/10.3390/s19040864 |