Towards an Ultra-Sensitive Temperature Sensor for Uncooled Infrared Sensing in CMOS–MEMS Technology

Microbolometers and photon detectors are two main technologies to address the needs in Infrared Sensing applications. While the microbolometers in both complementary metal-oxide semiconductor (CMOS) and Micro-Electro-Mechanical Systems (MEMS) technology offer many advantages over photon detectors, t...

Descripción completa

Detalles Bibliográficos
Autor principal: Göktaş, Hasan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6412715/
https://www.ncbi.nlm.nih.gov/pubmed/30736290
http://dx.doi.org/10.3390/mi10020108

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6412715/
https://www.ncbi.nlm.nih.gov/pubmed/30736290
http://dx.doi.org/10.3390/mi10020108

Ejemplares similares