Focus Tracking System for Femtosecond Laser Machining using Low Coherence Interferometry

We designed a real time, single-laser focus tracking system using low coherence properties of the machining femtosecond laser itself in order to monitor and correct the sample position relative to the focal plane. Using a Michelson Interferometer, the system collects data arising from part of the be...

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Detalles Bibliográficos
Autores principales: Raele, Marcus Paulo, De Pretto, Lucas Ramos, de Rossi, Wagner, Vieira, Nilson Dias, Samad, Ricardo Elgul
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6414527/
https://www.ncbi.nlm.nih.gov/pubmed/30862829
http://dx.doi.org/10.1038/s41598-019-40749-6

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6414527/
https://www.ncbi.nlm.nih.gov/pubmed/30862829
http://dx.doi.org/10.1038/s41598-019-40749-6

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