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Focus Tracking System for Femtosecond Laser Machining using Low Coherence Interferometry
We designed a real time, single-laser focus tracking system using low coherence properties of the machining femtosecond laser itself in order to monitor and correct the sample position relative to the focal plane. Using a Michelson Interferometer, the system collects data arising from part of the be...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6414527/ https://www.ncbi.nlm.nih.gov/pubmed/30862829 http://dx.doi.org/10.1038/s41598-019-40749-6 |