Numerical and Experimental Investigation into LWIR Transmission Performance of Complementary Silicon Subwavelength Antireflection Grating (SWARG) Structures

This paper presents a detailed comparison between the long wave infrared (LWIR) transmission performances of binary, silicon based, structurally complementary pillar and groove type antireflective gratings that can be used for wafer level vacuum packaging (WLVP) of uncooled microbolometer detectors....

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Detalles Bibliográficos
Autores principales: Cetin, Ramazan, Akin, Tayfun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6423122/
https://www.ncbi.nlm.nih.gov/pubmed/30886185
http://dx.doi.org/10.1038/s41598-019-41107-2

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6423122/
https://www.ncbi.nlm.nih.gov/pubmed/30886185
http://dx.doi.org/10.1038/s41598-019-41107-2

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