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Numerical and Experimental Investigation into LWIR Transmission Performance of Complementary Silicon Subwavelength Antireflection Grating (SWARG) Structures

This paper presents a detailed comparison between the long wave infrared (LWIR) transmission performances of binary, silicon based, structurally complementary pillar and groove type antireflective gratings that can be used for wafer level vacuum packaging (WLVP) of uncooled microbolometer detectors....

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Autores principales: Cetin, Ramazan, Akin, Tayfun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6423122/
https://www.ncbi.nlm.nih.gov/pubmed/30886185
http://dx.doi.org/10.1038/s41598-019-41107-2
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author Cetin, Ramazan
Akin, Tayfun
author_facet Cetin, Ramazan
Akin, Tayfun
author_sort Cetin, Ramazan
collection PubMed
description This paper presents a detailed comparison between the long wave infrared (LWIR) transmission performances of binary, silicon based, structurally complementary pillar and groove type antireflective gratings that can be used for wafer level vacuum packaging (WLVP) of uncooled microbolometer detectors. Both pillar and groove type gratings are designed with various topological configurations changing in various period sizes (Λ) from 1.0 μm to 2.0 μm, various heights/depths (h) from 0.8 μm to 1.8 μm, and various pillar/groove width-to-period (w/Λ) ratios from 0.6 to 1.0. The transmission performance of gratings is simulated with a hybrid simulation technique based on the modification of the reflection term within the Fresnel transmission equation, which combines both numerical and analytical approaches in a unique way for the first time in literature. Simulation results are experimentally verified with 19 different fabricated structures where a spectral agreement is achieved with an absolute root-mean-square (RMS) error less than 5.4% within the subwavelength (SW) regime, proving the effectiveness of the proposed hybrid technique. These results show first time in the literature that both pillar and groove type silicon based gratings present similar spectral IR transmission characteristics, and they are also structurally complementary when optimum configurations are employed to maximize the transmission.
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spelling pubmed-64231222019-03-26 Numerical and Experimental Investigation into LWIR Transmission Performance of Complementary Silicon Subwavelength Antireflection Grating (SWARG) Structures Cetin, Ramazan Akin, Tayfun Sci Rep Article This paper presents a detailed comparison between the long wave infrared (LWIR) transmission performances of binary, silicon based, structurally complementary pillar and groove type antireflective gratings that can be used for wafer level vacuum packaging (WLVP) of uncooled microbolometer detectors. Both pillar and groove type gratings are designed with various topological configurations changing in various period sizes (Λ) from 1.0 μm to 2.0 μm, various heights/depths (h) from 0.8 μm to 1.8 μm, and various pillar/groove width-to-period (w/Λ) ratios from 0.6 to 1.0. The transmission performance of gratings is simulated with a hybrid simulation technique based on the modification of the reflection term within the Fresnel transmission equation, which combines both numerical and analytical approaches in a unique way for the first time in literature. Simulation results are experimentally verified with 19 different fabricated structures where a spectral agreement is achieved with an absolute root-mean-square (RMS) error less than 5.4% within the subwavelength (SW) regime, proving the effectiveness of the proposed hybrid technique. These results show first time in the literature that both pillar and groove type silicon based gratings present similar spectral IR transmission characteristics, and they are also structurally complementary when optimum configurations are employed to maximize the transmission. Nature Publishing Group UK 2019-03-18 /pmc/articles/PMC6423122/ /pubmed/30886185 http://dx.doi.org/10.1038/s41598-019-41107-2 Text en © The Author(s) 2019 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.
spellingShingle Article
Cetin, Ramazan
Akin, Tayfun
Numerical and Experimental Investigation into LWIR Transmission Performance of Complementary Silicon Subwavelength Antireflection Grating (SWARG) Structures
title Numerical and Experimental Investigation into LWIR Transmission Performance of Complementary Silicon Subwavelength Antireflection Grating (SWARG) Structures
title_full Numerical and Experimental Investigation into LWIR Transmission Performance of Complementary Silicon Subwavelength Antireflection Grating (SWARG) Structures
title_fullStr Numerical and Experimental Investigation into LWIR Transmission Performance of Complementary Silicon Subwavelength Antireflection Grating (SWARG) Structures
title_full_unstemmed Numerical and Experimental Investigation into LWIR Transmission Performance of Complementary Silicon Subwavelength Antireflection Grating (SWARG) Structures
title_short Numerical and Experimental Investigation into LWIR Transmission Performance of Complementary Silicon Subwavelength Antireflection Grating (SWARG) Structures
title_sort numerical and experimental investigation into lwir transmission performance of complementary silicon subwavelength antireflection grating (swarg) structures
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6423122/
https://www.ncbi.nlm.nih.gov/pubmed/30886185
http://dx.doi.org/10.1038/s41598-019-41107-2
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