Low Concentration Response Hydrogen Sensors Based on Wheatstone Bridge

The PdNi film hydrogen sensors with Wheatstone bridge structure were designed and fabricated with the micro-electro-mechanical system (MEMS) technology. The integrated sensors consisted of four PdNi alloy film resistors. The internal two were shielded with silicon nitride film and used as reference...

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Detalles Bibliográficos
Autores principales: Jiang, Hongchuan, Tian, Xiaoyu, Deng, Xinwu, Zhao, Xiaohui, Zhang, Luying, Zhang, Wanli, Zhang, Jianfeng, Huang, Yifan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6427178/
https://www.ncbi.nlm.nih.gov/pubmed/30836675
http://dx.doi.org/10.3390/s19051096

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6427178/
https://www.ncbi.nlm.nih.gov/pubmed/30836675
http://dx.doi.org/10.3390/s19051096

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