Cargando…
Low Concentration Response Hydrogen Sensors Based on Wheatstone Bridge
The PdNi film hydrogen sensors with Wheatstone bridge structure were designed and fabricated with the micro-electro-mechanical system (MEMS) technology. The integrated sensors consisted of four PdNi alloy film resistors. The internal two were shielded with silicon nitride film and used as reference...
Autores principales: | , , , , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6427178/ https://www.ncbi.nlm.nih.gov/pubmed/30836675 http://dx.doi.org/10.3390/s19051096 |
_version_ | 1783405152065028096 |
---|---|
author | Jiang, Hongchuan Tian, Xiaoyu Deng, Xinwu Zhao, Xiaohui Zhang, Luying Zhang, Wanli Zhang, Jianfeng Huang, Yifan |
author_facet | Jiang, Hongchuan Tian, Xiaoyu Deng, Xinwu Zhao, Xiaohui Zhang, Luying Zhang, Wanli Zhang, Jianfeng Huang, Yifan |
author_sort | Jiang, Hongchuan |
collection | PubMed |
description | The PdNi film hydrogen sensors with Wheatstone bridge structure were designed and fabricated with the micro-electro-mechanical system (MEMS) technology. The integrated sensors consisted of four PdNi alloy film resistors. The internal two were shielded with silicon nitride film and used as reference resistors, while the others were used for hydrogen sensing. The PdNi alloy films and SiN films were deposited by magnetron sputtering. The morphology and microstructure of the PdNi films were characterized with X-ray diffraction (XRD). For efficient data acquisition, the output signal was converted from resistance to voltage. Hydrogen (H(2)) sensing properties of PdNi film hydrogen sensors with Wheatstone bridge structure were investigated under different temperatures (30 °C, 50 °C and 70 °C) and H(2) concentrations (from 10 ppm to 0.4%). The hydrogen sensor demonstrated distinct response at different hydrogen concentrations and high repeatability in cycle testing under 0.4% H(2) concentration. Towards 10 ppm hydrogen, the PdNi film hydrogen sensor had evident and collectable output voltage of 600 μV. |
format | Online Article Text |
id | pubmed-6427178 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2019 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-64271782019-04-15 Low Concentration Response Hydrogen Sensors Based on Wheatstone Bridge Jiang, Hongchuan Tian, Xiaoyu Deng, Xinwu Zhao, Xiaohui Zhang, Luying Zhang, Wanli Zhang, Jianfeng Huang, Yifan Sensors (Basel) Article The PdNi film hydrogen sensors with Wheatstone bridge structure were designed and fabricated with the micro-electro-mechanical system (MEMS) technology. The integrated sensors consisted of four PdNi alloy film resistors. The internal two were shielded with silicon nitride film and used as reference resistors, while the others were used for hydrogen sensing. The PdNi alloy films and SiN films were deposited by magnetron sputtering. The morphology and microstructure of the PdNi films were characterized with X-ray diffraction (XRD). For efficient data acquisition, the output signal was converted from resistance to voltage. Hydrogen (H(2)) sensing properties of PdNi film hydrogen sensors with Wheatstone bridge structure were investigated under different temperatures (30 °C, 50 °C and 70 °C) and H(2) concentrations (from 10 ppm to 0.4%). The hydrogen sensor demonstrated distinct response at different hydrogen concentrations and high repeatability in cycle testing under 0.4% H(2) concentration. Towards 10 ppm hydrogen, the PdNi film hydrogen sensor had evident and collectable output voltage of 600 μV. MDPI 2019-03-04 /pmc/articles/PMC6427178/ /pubmed/30836675 http://dx.doi.org/10.3390/s19051096 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Jiang, Hongchuan Tian, Xiaoyu Deng, Xinwu Zhao, Xiaohui Zhang, Luying Zhang, Wanli Zhang, Jianfeng Huang, Yifan Low Concentration Response Hydrogen Sensors Based on Wheatstone Bridge |
title | Low Concentration Response Hydrogen Sensors Based on Wheatstone Bridge |
title_full | Low Concentration Response Hydrogen Sensors Based on Wheatstone Bridge |
title_fullStr | Low Concentration Response Hydrogen Sensors Based on Wheatstone Bridge |
title_full_unstemmed | Low Concentration Response Hydrogen Sensors Based on Wheatstone Bridge |
title_short | Low Concentration Response Hydrogen Sensors Based on Wheatstone Bridge |
title_sort | low concentration response hydrogen sensors based on wheatstone bridge |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6427178/ https://www.ncbi.nlm.nih.gov/pubmed/30836675 http://dx.doi.org/10.3390/s19051096 |
work_keys_str_mv | AT jianghongchuan lowconcentrationresponsehydrogensensorsbasedonwheatstonebridge AT tianxiaoyu lowconcentrationresponsehydrogensensorsbasedonwheatstonebridge AT dengxinwu lowconcentrationresponsehydrogensensorsbasedonwheatstonebridge AT zhaoxiaohui lowconcentrationresponsehydrogensensorsbasedonwheatstonebridge AT zhangluying lowconcentrationresponsehydrogensensorsbasedonwheatstonebridge AT zhangwanli lowconcentrationresponsehydrogensensorsbasedonwheatstonebridge AT zhangjianfeng lowconcentrationresponsehydrogensensorsbasedonwheatstonebridge AT huangyifan lowconcentrationresponsehydrogensensorsbasedonwheatstonebridge |