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Identification and Compensation of Dynamic Interaction in a Non-Contact Dual-Stage Actuator System

Dynamic interaction seriously limits the overall performance of a Dual-Stage Actuator (DSA) system. This paper aims to identify and compensate for the dynamic interaction in a non-contact DSA system. The effects of the interaction in the non-contact DSA system are initially classified as non-contact...

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Detalles Bibliográficos
Autores principales: Wang, Shaokai, Hu, Jinxin, Li, Changqi, Tan, Jiubin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6427744/
https://www.ncbi.nlm.nih.gov/pubmed/30832236
http://dx.doi.org/10.3390/s19051053