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Identification and Compensation of Dynamic Interaction in a Non-Contact Dual-Stage Actuator System
Dynamic interaction seriously limits the overall performance of a Dual-Stage Actuator (DSA) system. This paper aims to identify and compensate for the dynamic interaction in a non-contact DSA system. The effects of the interaction in the non-contact DSA system are initially classified as non-contact...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6427744/ https://www.ncbi.nlm.nih.gov/pubmed/30832236 http://dx.doi.org/10.3390/s19051053 |