Evaluation of Hazardous Chemicals with Material Safety Data Sheet and By-products of a Photoresist Used in the Semiconductor-Manufacturing Industry

BACKGROUND: The photolithography process in the semiconductor industry uses various chemicals with little information on their constitution. This study aimed to identify the chemical constituents of photoresist (PR) products and their by-products and to compare these constituents with material safet...

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Detalles Bibliográficos
Autores principales: Jang, Miyeon, Yoon, Chungsik, Park, Jihoon, Kwon, Ohhun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Occupational Safety and Health Research Institute 2019
Materias:
Original Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6428989/
https://www.ncbi.nlm.nih.gov/pubmed/30949390
http://dx.doi.org/10.1016/j.shaw.2018.08.001

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6428989/
https://www.ncbi.nlm.nih.gov/pubmed/30949390
http://dx.doi.org/10.1016/j.shaw.2018.08.001

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