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Suppression of Filament Overgrowth in Conductive Bridge Random Access Memory by Ta(2)O(5)/TaO(x) Bi-Layer Structure
Bi-layer structure has been widely adopted to improve the reliability of the conductive bridge random access memory (CBRAM). In this work, we proposed a convenient and economical solution to achieve a Ta(2)O(5)/TaO(x) bi-layer structure by using a low-temperature annealing process. The addition of a...
Autores principales: | , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer US
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6439017/ https://www.ncbi.nlm.nih.gov/pubmed/30923974 http://dx.doi.org/10.1186/s11671-019-2942-x |