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Crystal orientation-dependent fatigue characteristics in micrometer-sized single-crystal silicon
Repetitive bending fatigue tests were performed using five types of single-crystal silicon specimens with different crystal orientations fabricated from {100} and {110} wafers. Fatigue lifetimes in a wide range between 10(0) and 10(10) were obtained using fan-shaped resonator test devices. Fracture...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group
2016
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6444710/ https://www.ncbi.nlm.nih.gov/pubmed/31057827 http://dx.doi.org/10.1038/micronano.2016.27 |