SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators

Over the past few decades, polydimethylsiloxane (PDMS) has become the material of choice for a variety of microsystem applications, including microfluidics, imprint lithography, and soft microrobotics. For most of these applications, PDMS is processed by replication molding; however, new application...

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Detalles Bibliográficos
Autores principales: Gorissen, Benjamin, Van Hoof, Chris, Reynaerts, Dominiek, De Volder, Michael
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6444735/
https://www.ncbi.nlm.nih.gov/pubmed/31057834
http://dx.doi.org/10.1038/micronano.2016.45

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6444735/
https://www.ncbi.nlm.nih.gov/pubmed/31057834
http://dx.doi.org/10.1038/micronano.2016.45

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