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SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators
Over the past few decades, polydimethylsiloxane (PDMS) has become the material of choice for a variety of microsystem applications, including microfluidics, imprint lithography, and soft microrobotics. For most of these applications, PDMS is processed by replication molding; however, new application...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6444735/ https://www.ncbi.nlm.nih.gov/pubmed/31057834 http://dx.doi.org/10.1038/micronano.2016.45 |