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New Insights on Factors Limiting the Carrier Transport in Very Thin Amorphous Sn-Doped In(2)O(3) Films with High Hall Mobility

We demonstrated that a mass density and size effect are dominant factors to limit the transport properties of very thin amorphous Sn-doped In(2)O(3) (a-ITO) films. a-ITO films with various thicknesses (t) ranging from 5 to 50 nm were deposited on non-alkali glass substrates without intentional heati...

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Detalles Bibliográficos
Autores principales: Furubayashi, Yutaka, Maehara, Makoto, Yamamoto, Tetsuya
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6445919/
https://www.ncbi.nlm.nih.gov/pubmed/30941535
http://dx.doi.org/10.1186/s11671-019-2948-4