Measuring Liquid Drop Properties on Nanoscale 1D Patterned Photoresist Structures

This communication reports liquid wetting properties of DI-water on one-dimensional nano-patterned photoresist lines atop a silicon substrate as the pattern period is varied from 0.3- to 1.0-µm. Both constant photoresist height and constant width/height ratios are investigated. The line/period ratio...

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Detalles Bibliográficos
Autores principales: Faria-Briceno, Juan J., Neumann, Alexander, Schunk, P. Randall, Brueck, S. R. J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6450940/
https://www.ncbi.nlm.nih.gov/pubmed/30952908
http://dx.doi.org/10.1038/s41598-019-42106-z

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6450940/
https://www.ncbi.nlm.nih.gov/pubmed/30952908
http://dx.doi.org/10.1038/s41598-019-42106-z

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