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Measuring Liquid Drop Properties on Nanoscale 1D Patterned Photoresist Structures
This communication reports liquid wetting properties of DI-water on one-dimensional nano-patterned photoresist lines atop a silicon substrate as the pattern period is varied from 0.3- to 1.0-µm. Both constant photoresist height and constant width/height ratios are investigated. The line/period ratio...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6450940/ https://www.ncbi.nlm.nih.gov/pubmed/30952908 http://dx.doi.org/10.1038/s41598-019-42106-z |