Nanofabrication of High-Resolution Periodic Structures with a Gap Size Below 100 nm by Two-Photon Polymerization

In this paper, approaches for the realization of high-resolution periodic structures with gap sizes at sub-100 nm scale by two-photon polymerization (2PP) are presented. The impact of laser intensity on the feature sizes and surface quality is investigated. The influence of different photosensitive...

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Detalles Bibliográficos
Autores principales: Zheng, Lei, Kurselis, Kestutis, El-Tamer, Ayman, Hinze, Ulf, Reinhardt, Carsten, Overmeyer, Ludger, Chichkov, Boris
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2019
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6470238/
https://www.ncbi.nlm.nih.gov/pubmed/30997578
http://dx.doi.org/10.1186/s11671-019-2955-5

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6470238/
https://www.ncbi.nlm.nih.gov/pubmed/30997578
http://dx.doi.org/10.1186/s11671-019-2955-5

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