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A Capacitive Micromachined Ultrasonic Transducer-Based Resonant Sensor Array for Portable Volatile Organic Compound Detection with Wireless Systems

The development of portable volatile organic compound (VOC) sensors is essential for home healthcare and workplace safety because VOCs are environmental pollutants that may critically affect human health. Here, we report a compact and portable sensor platform based on a capacitive micromachined ultr...

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Detalles Bibliográficos
Autores principales: Yoon, Inug, Eom, Gayoung, Lee, Sungwoo, Kim, Bo Kyeong, Kim, Sang Kyung, Lee, Hyunjoo J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6470568/
https://www.ncbi.nlm.nih.gov/pubmed/30901963
http://dx.doi.org/10.3390/s19061401