The Effects of Cold Arm Width and Metal Deposition on the Performance of a U-Beam Electrothermal MEMS Microgripper for Biomedical Applications

Microelectromechanical systems (MEMS) have established themselves within various fields dominated by high-precision micromanipulation, with the most distinguished sectors being the microassembly, micromanufacturing and biomedical ones. This paper presents a horizontal electrothermally actuated ‘hot...

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Detalles Bibliográficos
Autores principales: Cauchi, Marija, Grech, Ivan, Mallia, Bertram, Mollicone, Pierluigi, Sammut, Nicholas
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6470733/
https://www.ncbi.nlm.nih.gov/pubmed/30823372
http://dx.doi.org/10.3390/mi10030167

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6470733/
https://www.ncbi.nlm.nih.gov/pubmed/30823372
http://dx.doi.org/10.3390/mi10030167

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