Fabrication of Nanopillar Crystalline ITO Thin Films with High Transmittance and IR Reflectance by RF Magnetron Sputtering

Nanopillar crystalline indium tin oxide (ITO) thin films were deposited on soda-lime glass substrates by radio frequency (RF) magnetron sputtering under the power levels of 100 W, 150 W, 200 W and 250 W. The preparation process of thin films is divided into two steps, firstly, sputtering a very thin...

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Detalles Bibliográficos
Autores principales: Dong, Ling, Zhu, Guisheng, Xu, Huarui, Jiang, Xupeng, Zhang, Xiuyun, Zhao, Yunyun, Yan, Dongliang, Yuan, Le, Yu, Aibing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6471012/
https://www.ncbi.nlm.nih.gov/pubmed/30909418
http://dx.doi.org/10.3390/ma12060958

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6471012/
https://www.ncbi.nlm.nih.gov/pubmed/30909418
http://dx.doi.org/10.3390/ma12060958

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