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Fabrication of Nanopillar Crystalline ITO Thin Films with High Transmittance and IR Reflectance by RF Magnetron Sputtering

Nanopillar crystalline indium tin oxide (ITO) thin films were deposited on soda-lime glass substrates by radio frequency (RF) magnetron sputtering under the power levels of 100 W, 150 W, 200 W and 250 W. The preparation process of thin films is divided into two steps, firstly, sputtering a very thin...

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Detalles Bibliográficos
Autores principales:	Dong, Ling, Zhu, Guisheng, Xu, Huarui, Jiang, Xupeng, Zhang, Xiuyun, Zhao, Yunyun, Yan, Dongliang, Yuan, Le, Yu, Aibing
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6471012/ https://www.ncbi.nlm.nih.gov/pubmed/30909418 http://dx.doi.org/10.3390/ma12060958

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