Design, Fabrication and Experiment of Double U-Beam MEMS Vibration Ring Gyroscope

This study presents a new microelectromechanical system, a vibration ring gyroscope with a double U-beam (DUVRG), which was designed using a combination of mathematical analysis and the finite element method. First, a ring vibration resonator with eight double U-beam structures was developed, and 24...

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Detalles Bibliográficos
Autores principales: Cao, Huiliang, Liu, Yu, Kou, Zhiwei, Zhang, Yingjie, Shao, Xingling, Gao, Jinyang, Huang, Kun, Shi, Yunbo, Tang, Jun, Shen, Chong, Liu, Jun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6471518/
https://www.ncbi.nlm.nih.gov/pubmed/30871223
http://dx.doi.org/10.3390/mi10030186

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6471518/
https://www.ncbi.nlm.nih.gov/pubmed/30871223
http://dx.doi.org/10.3390/mi10030186

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