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Design, Fabrication and Experiment of Double U-Beam MEMS Vibration Ring Gyroscope

This study presents a new microelectromechanical system, a vibration ring gyroscope with a double U-beam (DUVRG), which was designed using a combination of mathematical analysis and the finite element method. First, a ring vibration resonator with eight double U-beam structures was developed, and 24...

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Detalles Bibliográficos
Autores principales:	Cao, Huiliang, Liu, Yu, Kou, Zhiwei, Zhang, Yingjie, Shao, Xingling, Gao, Jinyang, Huang, Kun, Shi, Yunbo, Tang, Jun, Shen, Chong, Liu, Jun
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6471518/ https://www.ncbi.nlm.nih.gov/pubmed/30871223 http://dx.doi.org/10.3390/mi10030186

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