Mechanical Behaviors Research and the Structural Design of a Bipolar Electrostatic Actuation Microbeam Resonator

A class of bipolar electrostatically actuated micro-resonators is presented in this paper. Two parametric equations are proposed for changing the microbeam shape of the upper and lower sections. The mechanical properties of a micro-resonator can be enhanced by optimizing the two section parameters....

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Detalles Bibliográficos
Autores principales: Feng, Jingjing, Liu, Cheng, Zhang, Wei, Han, Jianxin, Hao, Shuying
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6471854/
https://www.ncbi.nlm.nih.gov/pubmed/30889880
http://dx.doi.org/10.3390/s19061348

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6471854/
https://www.ncbi.nlm.nih.gov/pubmed/30889880
http://dx.doi.org/10.3390/s19061348

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