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Mechanical Behaviors Research and the Structural Design of a Bipolar Electrostatic Actuation Microbeam Resonator
A class of bipolar electrostatically actuated micro-resonators is presented in this paper. Two parametric equations are proposed for changing the microbeam shape of the upper and lower sections. The mechanical properties of a micro-resonator can be enhanced by optimizing the two section parameters....
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6471854/ https://www.ncbi.nlm.nih.gov/pubmed/30889880 http://dx.doi.org/10.3390/s19061348 |