Technological Platform for Vertical Multi-Wafer Integration of Microscanners and Micro-Optical Components

We describe an original integration technological platform for the miniaturization of micromachined on-chip optical microscopes, such as the laser scanning confocal microscope. The platform employs the multi-wafer vertical integration approach, combined with integrated glass-based micro-optics as we...

Descripción completa

Detalles Bibliográficos
Autores principales: Bargiel, Sylwester, Baranski, Maciej, Wiemer, Maik, Frömel, Jörg, Wang, Wei-Shan, Gorecki, Christophe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6471930/
https://www.ncbi.nlm.nih.gov/pubmed/30871213
http://dx.doi.org/10.3390/mi10030185

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6471930/
https://www.ncbi.nlm.nih.gov/pubmed/30871213
http://dx.doi.org/10.3390/mi10030185

Ejemplares similares