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Technological Platform for Vertical Multi-Wafer Integration of Microscanners and Micro-Optical Components

We describe an original integration technological platform for the miniaturization of micromachined on-chip optical microscopes, such as the laser scanning confocal microscope. The platform employs the multi-wafer vertical integration approach, combined with integrated glass-based micro-optics as we...

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Detalles Bibliográficos
Autores principales:	Bargiel, Sylwester, Baranski, Maciej, Wiemer, Maik, Frömel, Jörg, Wang, Wei-Shan, Gorecki, Christophe
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6471930/ https://www.ncbi.nlm.nih.gov/pubmed/30871213 http://dx.doi.org/10.3390/mi10030185

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