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A Dual-Chamber Serial–Parallel Piezoelectric Pump with an Integrated Sensor for Flow Rate Measurement

A new concept of a dual-chamber serial-parallel piezoelectric pump with an integrated sensor (DSPPIS) is presented in this paper. By means of dividing a piezoelectric bimorph into an actuator and a sensor, sensing function is integrated onto the DSPPIS for flow rate measurement. A prototype of the D...

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Detalles Bibliográficos
Autores principales: Chen, Song, Yu, Mai, Kan, Junwu, Li, Jianping, Zhang, Zhonghua, Xie, Xinyi, Wang, Xiaomin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6472054/
https://www.ncbi.nlm.nih.gov/pubmed/30934536
http://dx.doi.org/10.3390/s19061447