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A Dual-Chamber Serial–Parallel Piezoelectric Pump with an Integrated Sensor for Flow Rate Measurement
A new concept of a dual-chamber serial-parallel piezoelectric pump with an integrated sensor (DSPPIS) is presented in this paper. By means of dividing a piezoelectric bimorph into an actuator and a sensor, sensing function is integrated onto the DSPPIS for flow rate measurement. A prototype of the D...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6472054/ https://www.ncbi.nlm.nih.gov/pubmed/30934536 http://dx.doi.org/10.3390/s19061447 |