Enhanced Si Passivation and PERC Solar Cell Efficiency by Atomic Layer Deposited Aluminum Oxide with Two-step Post Annealing

In this study, aluminum oxide (Al(2)O(3)) films were prepared by a spatial atomic layer deposition using deionized water and trimethylaluminum, followed by oxygen (O(2)), forming gas (FG), or two-step annealing. Minority carrier lifetime of the samples was measured by Sinton WCT-120. Field-effect pa...

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Detalles Bibliográficos
Autores principales: Hsu, Chia-Hsun, Cho, Yun-Shao, Wu, Wan-Yu, Lien, Shui-Yang, Zhang, Xiao-Ying, Zhu, Wen-Zhang, Zhang, Sam, Chen, Song-Yan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2019
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6473015/
https://www.ncbi.nlm.nih.gov/pubmed/31001714
http://dx.doi.org/10.1186/s11671-019-2969-z

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6473015/
https://www.ncbi.nlm.nih.gov/pubmed/31001714
http://dx.doi.org/10.1186/s11671-019-2969-z

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