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Enhanced Si Passivation and PERC Solar Cell Efficiency by Atomic Layer Deposited Aluminum Oxide with Two-step Post Annealing
In this study, aluminum oxide (Al(2)O(3)) films were prepared by a spatial atomic layer deposition using deionized water and trimethylaluminum, followed by oxygen (O(2)), forming gas (FG), or two-step annealing. Minority carrier lifetime of the samples was measured by Sinton WCT-120. Field-effect pa...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer US
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6473015/ https://www.ncbi.nlm.nih.gov/pubmed/31001714 http://dx.doi.org/10.1186/s11671-019-2969-z |