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Role of Structure and Composition on the Performances of P-Type Tin Oxide Thin-Film Transistors Processed at Low-Temperatures

This work reports on the role of structure and composition on the determination of the performances of p-type SnO(x) TFTs with a bottom gate configuration deposited by rf magnetron sputtering at room temperature, followed by a post-annealed step up to 200 °C at different oxygen partial pressures (O(...

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Detalles Bibliográficos
Autores principales: Barros, Raquel, Saji, Kachirayil J., Waerenborgh, João C., Barquinha, Pedro, Pereira, Luís, Carlos, Emanuel, Martins, Rodrigo, Fortunato, Elvira
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6473352/
https://www.ncbi.nlm.nih.gov/pubmed/30823629
http://dx.doi.org/10.3390/nano9030320