Cargando…
Tantalum Oxynitride Thin Films: Assessment of the Photocatalytic Efficiency and Antimicrobial Capacity
Tantalum oxynitride thin films have been deposited by reactive magnetron sputtering, using a fixed proportion reactive gas mixture (85% N(2) + 15% O(2)). To produce the films, the partial pressure of the mixture in the working atmosphere was varied. The characteristics of the produced films were ana...
Autores principales: | , , , , , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6474096/ https://www.ncbi.nlm.nih.gov/pubmed/30909538 http://dx.doi.org/10.3390/nano9030476 |