Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers

Micromachined resonant accelerometers (MRAs), especially those devices fabricated by silicon on glass technology, suffer from temperature drift error caused by inherent thermal stress. This paper proposes two structure designs to attenuate the effect of thermal stress. The first MRA structure is rea...

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Detalles Bibliográficos
Autores principales: Yin, Yonggang, Fang, Zhengxiang, Liu, Yunfeng, Han, Fengtian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6479284/
https://www.ncbi.nlm.nih.gov/pubmed/30935015
http://dx.doi.org/10.3390/s19071544

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6479284/
https://www.ncbi.nlm.nih.gov/pubmed/30935015
http://dx.doi.org/10.3390/s19071544

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