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Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers
Micromachined resonant accelerometers (MRAs), especially those devices fabricated by silicon on glass technology, suffer from temperature drift error caused by inherent thermal stress. This paper proposes two structure designs to attenuate the effect of thermal stress. The first MRA structure is rea...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6479284/ https://www.ncbi.nlm.nih.gov/pubmed/30935015 http://dx.doi.org/10.3390/s19071544 |
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author | Yin, Yonggang Fang, Zhengxiang Liu, Yunfeng Han, Fengtian |
author_facet | Yin, Yonggang Fang, Zhengxiang Liu, Yunfeng Han, Fengtian |
author_sort | Yin, Yonggang |
collection | PubMed |
description | Micromachined resonant accelerometers (MRAs), especially those devices fabricated by silicon on glass technology, suffer from temperature drift error caused by inherent thermal stress. This paper proposes two structure designs to attenuate the effect of thermal stress. The first MRA structure is realized by optimizing the locations of the bonding anchors and utilizing a special-shaped substrate to isolate the thermal stress generated during the die attach process. The second structure is designed using an isolation frame fixed by a single anchor to replace all dispersed anchors associated with the suspension beams and micro-levers. Simulated and experimental results show that both of the MRA structures can effectively reduce the thermal stress effect. The experimental results on one MRA prototype indicate that the differential temperature sensitivity reduces down to 1.9 μg/°C and its 15-day bias stability reaches 1.4 μg. |
format | Online Article Text |
id | pubmed-6479284 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2019 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-64792842019-04-29 Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers Yin, Yonggang Fang, Zhengxiang Liu, Yunfeng Han, Fengtian Sensors (Basel) Article Micromachined resonant accelerometers (MRAs), especially those devices fabricated by silicon on glass technology, suffer from temperature drift error caused by inherent thermal stress. This paper proposes two structure designs to attenuate the effect of thermal stress. The first MRA structure is realized by optimizing the locations of the bonding anchors and utilizing a special-shaped substrate to isolate the thermal stress generated during the die attach process. The second structure is designed using an isolation frame fixed by a single anchor to replace all dispersed anchors associated with the suspension beams and micro-levers. Simulated and experimental results show that both of the MRA structures can effectively reduce the thermal stress effect. The experimental results on one MRA prototype indicate that the differential temperature sensitivity reduces down to 1.9 μg/°C and its 15-day bias stability reaches 1.4 μg. MDPI 2019-03-30 /pmc/articles/PMC6479284/ /pubmed/30935015 http://dx.doi.org/10.3390/s19071544 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Yin, Yonggang Fang, Zhengxiang Liu, Yunfeng Han, Fengtian Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers |
title | Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers |
title_full | Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers |
title_fullStr | Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers |
title_full_unstemmed | Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers |
title_short | Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers |
title_sort | temperature-insensitive structure design of micromachined resonant accelerometers |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6479284/ https://www.ncbi.nlm.nih.gov/pubmed/30935015 http://dx.doi.org/10.3390/s19071544 |
work_keys_str_mv | AT yinyonggang temperatureinsensitivestructuredesignofmicromachinedresonantaccelerometers AT fangzhengxiang temperatureinsensitivestructuredesignofmicromachinedresonantaccelerometers AT liuyunfeng temperatureinsensitivestructuredesignofmicromachinedresonantaccelerometers AT hanfengtian temperatureinsensitivestructuredesignofmicromachinedresonantaccelerometers |