Analysis of a Hybrid Micro-Electro-Mechanical Sensor Based on Graphene Oxide/Polyvinyl Alcohol for Humidity Measurements †

In this paper, we present a redundant microsensor based on the bulk and etch silicon‑on‑insulator (BESOI) process for measuring relative humidity (RH), by using a graphene‑oxide/polyvinyl‑alcohol (GO/PVA) composite. The MEMS is a mechanical oscillator, composed of a proof mass with multilayer of nan...

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Detalles Bibliográficos
Autores principales: Trigona, Carlo, Al-Hamry, Ammar, Kanoun, Olfa, Baglio, Salvatore
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6479286/
https://www.ncbi.nlm.nih.gov/pubmed/30974875
http://dx.doi.org/10.3390/s19071720

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6479286/
https://www.ncbi.nlm.nih.gov/pubmed/30974875
http://dx.doi.org/10.3390/s19071720

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