An Optical MEMS Acoustic Sensor Based on Grating Interferometer

Acoustic detection is of great significance because of its wide applications. This paper reports a Micro-Electro-Mechanical System (MEMS) acoustic sensor based on grating interferometer. In the MEMS structure, a diaphragm and a micro-grating made up the interference cavity. A short-cavity structure...

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Detalles Bibliográficos
Autores principales: Zhang, Mengying, Wu, Gaomi, Ren, Dipeng, Gao, Ran, Qi, Zhi-Mei, Liang, Xingdong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6479327/
https://www.ncbi.nlm.nih.gov/pubmed/30925691
http://dx.doi.org/10.3390/s19071503

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6479327/
https://www.ncbi.nlm.nih.gov/pubmed/30925691
http://dx.doi.org/10.3390/s19071503

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