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An Optical MEMS Acoustic Sensor Based on Grating Interferometer

Acoustic detection is of great significance because of its wide applications. This paper reports a Micro-Electro-Mechanical System (MEMS) acoustic sensor based on grating interferometer. In the MEMS structure, a diaphragm and a micro-grating made up the interference cavity. A short-cavity structure...

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Detalles Bibliográficos
Autores principales: Zhang, Mengying, Wu, Gaomi, Ren, Dipeng, Gao, Ran, Qi, Zhi-Mei, Liang, Xingdong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6479327/
https://www.ncbi.nlm.nih.gov/pubmed/30925691
http://dx.doi.org/10.3390/s19071503
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author Zhang, Mengying
Wu, Gaomi
Ren, Dipeng
Gao, Ran
Qi, Zhi-Mei
Liang, Xingdong
author_facet Zhang, Mengying
Wu, Gaomi
Ren, Dipeng
Gao, Ran
Qi, Zhi-Mei
Liang, Xingdong
author_sort Zhang, Mengying
collection PubMed
description Acoustic detection is of great significance because of its wide applications. This paper reports a Micro-Electro-Mechanical System (MEMS) acoustic sensor based on grating interferometer. In the MEMS structure, a diaphragm and a micro-grating made up the interference cavity. A short-cavity structure was designed and fabricated to reduce the impact of temperature on the cavity length in order to improve its stability against environment temperature variations. Besides this, through holes were designed in the substrate of the grating to reduce the air damping of the short-cavity structure. A silicon diaphragm with a 16.919 µm deep cavity and 2.4 µm period grating were fabricated by an improved MEMS process. The fabricated sensor chip was packaged on a conditioning circuit with a laser diode and a photodetector for acoustic detection. The output voltage signal in response to an acoustic wave is of high quality. The sensitivity of the acoustic sensor is up to −15.14 dB re 1 V/Pa @ 1 kHz. The output signal of the high-stability acoustic sensor almost unchanged as the environment temperature ranged from 5 °C to 55 °C.
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spelling pubmed-64793272019-04-29 An Optical MEMS Acoustic Sensor Based on Grating Interferometer Zhang, Mengying Wu, Gaomi Ren, Dipeng Gao, Ran Qi, Zhi-Mei Liang, Xingdong Sensors (Basel) Article Acoustic detection is of great significance because of its wide applications. This paper reports a Micro-Electro-Mechanical System (MEMS) acoustic sensor based on grating interferometer. In the MEMS structure, a diaphragm and a micro-grating made up the interference cavity. A short-cavity structure was designed and fabricated to reduce the impact of temperature on the cavity length in order to improve its stability against environment temperature variations. Besides this, through holes were designed in the substrate of the grating to reduce the air damping of the short-cavity structure. A silicon diaphragm with a 16.919 µm deep cavity and 2.4 µm period grating were fabricated by an improved MEMS process. The fabricated sensor chip was packaged on a conditioning circuit with a laser diode and a photodetector for acoustic detection. The output voltage signal in response to an acoustic wave is of high quality. The sensitivity of the acoustic sensor is up to −15.14 dB re 1 V/Pa @ 1 kHz. The output signal of the high-stability acoustic sensor almost unchanged as the environment temperature ranged from 5 °C to 55 °C. MDPI 2019-03-28 /pmc/articles/PMC6479327/ /pubmed/30925691 http://dx.doi.org/10.3390/s19071503 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Zhang, Mengying
Wu, Gaomi
Ren, Dipeng
Gao, Ran
Qi, Zhi-Mei
Liang, Xingdong
An Optical MEMS Acoustic Sensor Based on Grating Interferometer
title An Optical MEMS Acoustic Sensor Based on Grating Interferometer
title_full An Optical MEMS Acoustic Sensor Based on Grating Interferometer
title_fullStr An Optical MEMS Acoustic Sensor Based on Grating Interferometer
title_full_unstemmed An Optical MEMS Acoustic Sensor Based on Grating Interferometer
title_short An Optical MEMS Acoustic Sensor Based on Grating Interferometer
title_sort optical mems acoustic sensor based on grating interferometer
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6479327/
https://www.ncbi.nlm.nih.gov/pubmed/30925691
http://dx.doi.org/10.3390/s19071503
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