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An Optical MEMS Acoustic Sensor Based on Grating Interferometer
Acoustic detection is of great significance because of its wide applications. This paper reports a Micro-Electro-Mechanical System (MEMS) acoustic sensor based on grating interferometer. In the MEMS structure, a diaphragm and a micro-grating made up the interference cavity. A short-cavity structure...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6479327/ https://www.ncbi.nlm.nih.gov/pubmed/30925691 http://dx.doi.org/10.3390/s19071503 |
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author | Zhang, Mengying Wu, Gaomi Ren, Dipeng Gao, Ran Qi, Zhi-Mei Liang, Xingdong |
author_facet | Zhang, Mengying Wu, Gaomi Ren, Dipeng Gao, Ran Qi, Zhi-Mei Liang, Xingdong |
author_sort | Zhang, Mengying |
collection | PubMed |
description | Acoustic detection is of great significance because of its wide applications. This paper reports a Micro-Electro-Mechanical System (MEMS) acoustic sensor based on grating interferometer. In the MEMS structure, a diaphragm and a micro-grating made up the interference cavity. A short-cavity structure was designed and fabricated to reduce the impact of temperature on the cavity length in order to improve its stability against environment temperature variations. Besides this, through holes were designed in the substrate of the grating to reduce the air damping of the short-cavity structure. A silicon diaphragm with a 16.919 µm deep cavity and 2.4 µm period grating were fabricated by an improved MEMS process. The fabricated sensor chip was packaged on a conditioning circuit with a laser diode and a photodetector for acoustic detection. The output voltage signal in response to an acoustic wave is of high quality. The sensitivity of the acoustic sensor is up to −15.14 dB re 1 V/Pa @ 1 kHz. The output signal of the high-stability acoustic sensor almost unchanged as the environment temperature ranged from 5 °C to 55 °C. |
format | Online Article Text |
id | pubmed-6479327 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2019 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-64793272019-04-29 An Optical MEMS Acoustic Sensor Based on Grating Interferometer Zhang, Mengying Wu, Gaomi Ren, Dipeng Gao, Ran Qi, Zhi-Mei Liang, Xingdong Sensors (Basel) Article Acoustic detection is of great significance because of its wide applications. This paper reports a Micro-Electro-Mechanical System (MEMS) acoustic sensor based on grating interferometer. In the MEMS structure, a diaphragm and a micro-grating made up the interference cavity. A short-cavity structure was designed and fabricated to reduce the impact of temperature on the cavity length in order to improve its stability against environment temperature variations. Besides this, through holes were designed in the substrate of the grating to reduce the air damping of the short-cavity structure. A silicon diaphragm with a 16.919 µm deep cavity and 2.4 µm period grating were fabricated by an improved MEMS process. The fabricated sensor chip was packaged on a conditioning circuit with a laser diode and a photodetector for acoustic detection. The output voltage signal in response to an acoustic wave is of high quality. The sensitivity of the acoustic sensor is up to −15.14 dB re 1 V/Pa @ 1 kHz. The output signal of the high-stability acoustic sensor almost unchanged as the environment temperature ranged from 5 °C to 55 °C. MDPI 2019-03-28 /pmc/articles/PMC6479327/ /pubmed/30925691 http://dx.doi.org/10.3390/s19071503 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Zhang, Mengying Wu, Gaomi Ren, Dipeng Gao, Ran Qi, Zhi-Mei Liang, Xingdong An Optical MEMS Acoustic Sensor Based on Grating Interferometer |
title | An Optical MEMS Acoustic Sensor Based on Grating Interferometer |
title_full | An Optical MEMS Acoustic Sensor Based on Grating Interferometer |
title_fullStr | An Optical MEMS Acoustic Sensor Based on Grating Interferometer |
title_full_unstemmed | An Optical MEMS Acoustic Sensor Based on Grating Interferometer |
title_short | An Optical MEMS Acoustic Sensor Based on Grating Interferometer |
title_sort | optical mems acoustic sensor based on grating interferometer |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6479327/ https://www.ncbi.nlm.nih.gov/pubmed/30925691 http://dx.doi.org/10.3390/s19071503 |
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