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An Optical MEMS Acoustic Sensor Based on Grating Interferometer

Acoustic detection is of great significance because of its wide applications. This paper reports a Micro-Electro-Mechanical System (MEMS) acoustic sensor based on grating interferometer. In the MEMS structure, a diaphragm and a micro-grating made up the interference cavity. A short-cavity structure...

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Detalles Bibliográficos
Autores principales:	Zhang, Mengying, Wu, Gaomi, Ren, Dipeng, Gao, Ran, Qi, Zhi-Mei, Liang, Xingdong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6479327/ https://www.ncbi.nlm.nih.gov/pubmed/30925691 http://dx.doi.org/10.3390/s19071503

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