3D Patterning of Si by Contact Etching With Nanoporous Metals

Nanoporous gold and platinum electrodes are used to pattern n-type silicon by contact etching at the macroscopic scale. This type of electrode has the advantage of forming nanocontacts between silicon, the metal and the electrolyte as in classical metal assisted chemical etching while ensuring elect...

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Detalles Bibliográficos
Autores principales: Bastide, Stéphane, Torralba, Encarnacion, Halbwax, Mathieu, Le Gall, Sylvain, Mpogui, Elias, Cachet-Vivier, Christine, Magnin, Vincent, Harari, Joseph, Yarekha, Dmitri, Vilcot, Jean-Pierre
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Frontiers Media S.A. 2019
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6494945/
https://www.ncbi.nlm.nih.gov/pubmed/31106193
http://dx.doi.org/10.3389/fchem.2019.00256

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6494945/
https://www.ncbi.nlm.nih.gov/pubmed/31106193
http://dx.doi.org/10.3389/fchem.2019.00256

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