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High-Sensitivity and Long-Life Microchannel Plate Processed by Atomic Layer Deposition
As a key component of electron multiplier device, a microchannel plate (MCP) can be applied in many scientific fields. Pure aluminum oxide (Al(2)O(3)) as secondary electron emission (SEE) layer were deposited in the pores of MCP via atomic layer deposition (ALD) to overcome problems such as high dar...
Autores principales: | , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer US
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6502932/ https://www.ncbi.nlm.nih.gov/pubmed/31062184 http://dx.doi.org/10.1186/s11671-019-2983-1 |