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Three-to-One Internal Resonance in MEMS Arch Resonators

We present an investigation of the nonlinear dynamics of a microelectromechanical system (MEMS) arch subjected to a combination of AC and DC loadings in the presence of three-to-one internal resonance. The axial force resulting from the residual stress or temperature variation is considered in the g...

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Detalles Bibliográficos
Autores principales: Wang, Ze, Ren, Jianting
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6515359/
https://www.ncbi.nlm.nih.gov/pubmed/31010047
http://dx.doi.org/10.3390/s19081888