The Investigation of High-Temperature SAW Oxygen Sensor Based on ZnO Films

In this paper, a wireless oxygen sensor based on a surface acoustic wave (SAW) was reported. For high-temperature applications, novel Al(2)O(3)/ZnO/Pt multilayered conductive film was deposited on langasite substrate as the electrodes, and ZnO film obtained by the pulse laser deposition (PLD) method...

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Detalles Bibliográficos
Autores principales: Shu, Lin, Wang, Xuemin, Yan, Dawei, Fan, Long, Wu, Weidong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6515368/
https://www.ncbi.nlm.nih.gov/pubmed/30991737
http://dx.doi.org/10.3390/ma12081235

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6515368/
https://www.ncbi.nlm.nih.gov/pubmed/30991737
http://dx.doi.org/10.3390/ma12081235

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