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Wafer-Scale Fabrication of Sub-10 nm TiO(2)-Ga(2)O(3)n-p Heterojunctions with Efficient Photocatalytic Activity by Atomic Layer Deposition
ABSTRACT: Wafer-scale, conformal, two-dimensional (2D) TiO(2)-Ga(2)O(3) n-p heterostructures with a thickness of less than 10 nm were fabricated on the Si/SiO(2) substrates by the atomic layer deposition (ALD) technique for the first time with subsequent post-deposition annealing at a temperature of...
Autores principales: | , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer US
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6517468/ https://www.ncbi.nlm.nih.gov/pubmed/31089900 http://dx.doi.org/10.1186/s11671-019-2991-1 |