Design, Fabrication, and Testing of a Monolithically Integrated Tri-Axis High-Shock Accelerometer in Single (111)-Silicon Wafer

In this paper, a monolithic tri-axis piezoresistive high-shock accelerometer has been proposed that has been single-sided fabricated in a single (111)-silicon wafer. A single-cantilever structure and two dual-cantilever structures are designed and micromachined in one (111)-silicon chip to detect Z-...

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Detalles Bibliográficos
Autores principales: Cai, Shengran, Li, Wei, Zou, Hongshuo, Bao, Haifei, Zhang, Kun, Wang, Jiachou, Song, Zhaohui, Li, Xinxin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523188/
https://www.ncbi.nlm.nih.gov/pubmed/30934908
http://dx.doi.org/10.3390/mi10040227

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523188/
https://www.ncbi.nlm.nih.gov/pubmed/30934908
http://dx.doi.org/10.3390/mi10040227

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