Research on the Disc Sensitive Structure of a Micro Optoelectromechanical System (MOEMS) Resonator Gyroscope

A micro optoelectromechanical system (MOEMS) resonator gyroscope based on a waveguide micro-ring resonator was proposed. This sensor was operated by measuring the shift of the transmission spectrum. Modal analysis was carried out for the disc sensitive structure of the MOEMS resonator gyroscope (MOE...

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Detalles Bibliográficos
Autores principales: Shen, Xiang, Zhao, Liye, Xia, Dunzhu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523694/
https://www.ncbi.nlm.nih.gov/pubmed/31010214
http://dx.doi.org/10.3390/mi10040264

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523694/
https://www.ncbi.nlm.nih.gov/pubmed/31010214
http://dx.doi.org/10.3390/mi10040264

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