The Effects of Precursor C(2)H(2) Fraction on Microstructure and Properties of Amorphous Carbon Composite Films Containing Si and Ag Prepared by Magnetron Sputtering Deposition

Hydrogenated graphite-like carbon composite films containing silicon (Si) and silver (Ag) (g-C:H:Si:Ag) were prepared by middle frequency magnetron sputtering deposition in argon (Ar) and acetylene (C(2)H(2)) mixture gases. The effects of precursor C(2)H(2) fraction on the microstructure and propert...

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Detalles Bibliográficos
Autores principales: Liu, Xiaoqiang, Hao, Junying, Lv, Yongjun, Cui, Xuejun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523700/
https://www.ncbi.nlm.nih.gov/pubmed/30987154
http://dx.doi.org/10.3390/nano9040528

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523700/
https://www.ncbi.nlm.nih.gov/pubmed/30987154
http://dx.doi.org/10.3390/nano9040528

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